Epoka University Library catalog

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Senturia, Stephen D., 1940-

Microsystem design / Stephen D. Senturia. - Boston : Kluwer Academic Publishers, 2001. - xxvi, 689 p. : ill. ; 24 cm.

Includes bibliographical references (p. [665]-676) and index.

ISBN: 0792372468 (alk. paper)

LCCN: 00048768

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.

LC Class. No.: TK7875 / .S46 2000

Dewey Class. No.: 621.381

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