Integrated circuits : chemical and physical processing : developed from the winter symposium / sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 ; Pieter Stroeve, editor. - Washington, D.C. : American Chemical Society, 1985. - ix, 348 p. : ill. ; 24 cm. - ACS symposium series, 290 0097-6156 ; .

Includes bibliographies and indexes.

0841209405

85019944


Integrated circuits--Very large scale integration--Design and construction--Congresses.

TK7874 / .I5462 1985

TK 7874 .I5462 1985

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