Epoka University Library catalog

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Fatikow, S. 1960-

Microsystem technology and microrobotics / S. Fatikow, U. Rembold. - Berlin ; New York : Springer, c1997. - xii, 408 p. : ill. ; 24 cm.

Includes bibliographical references (p. [366]-401) and index.

ISBN: 3540606580 (hc : alk. paper)

LCCN: 96053992

Subjects--Topical Terms:
Electromechanical devices--Design and construction.
Microrobots.
Microfabrication.
Robotics.

LC Class. No.: TJ163 / .F38 1997

Dewey Class. No.: TJ 163 .F38 1997

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