TY - BOOK AU - Senturia, Stephen D., TI - Microsystem design SN - 0792372468 AV - TK7875 .S46 2000 U1 - 621.381 21 PY - 2001/// CY - Boston PB - Kluwer Academic Publishers KW - Microelectronics KW - Microelectromechanical systems KW - Design and construction KW - System design N1 - Includes bibliographical references (p. [665]-676) and index UR - http://www.loc.gov/catdir/enhancements/fy0821/00048768-d.html UR - http://www.loc.gov/catdir/enhancements/fy0821/00048768-t.html ER -