01149pam a2200313 a 4500
4947068
OSt
20190606144148.0
961223s1997 gw a b 001 0 eng
96053992
3540606580 (hc : alk. paper)
DLC
DLC
DLC
TJ163
.F38 1997
TJ 163 .F38 1997
21
Fatikow, S.
(Sergej),
1960-
Microsystem technology and microrobotics /
S. Fatikow, U. Rembold.
Berlin ;
New York :
Springer,
c1997.
xii, 408 p. :
ill. ;
24 cm.
Includes bibliographical references (p. [366]-401) and index.
Electromechanical devices
Design and construction.
Microrobots.
Microfabrication.
Robotics.
Rembold, Ulrich.
Publisher description
http://www.loc.gov/catdir/enhancements/fy0815/96053992-d.html
7
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pc20 to ja00 12-23-96; jf07 to subj. 12-23-96; jf11 to sl 12-26-96; jg07 12-26-96; CIP ver. jc09 06-27-97
9394
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EUL
2019-06-06
8069
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ddc
2019-06-06
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TJ_163__F38_199700000000000
BK
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2019-06-06
TJ 163 .F38 1997
0