Microsystem technology and microrobotics
Fatikow, S. (Sergej)
1960-
creator
Rembold, Ulrich.
text
bibliography
gw
Berlin
New York
Springer
c1997
1997
monographic
eng
xii, 408 p. : ill. ; 24 cm.
S. Fatikow, U. Rembold.
Includes bibliographical references (p. [366]-401) and index.
Electromechanical devices
Design and construction
Microrobots
Microfabrication
Robotics
TJ163 .F38 1997
TJ 163 .F38 1997
3540606580 (hc : alk. paper)
96053992
http://www.loc.gov/catdir/enhancements/fy0815/96053992-d.html
http://www.loc.gov/catdir/enhancements/fy0815/96053992-d.html
DLC
961223
20190606144148.0
4947068