TY - BOOK AU - Fatikow, S. AU - Rembold, Ulrich. TI - Microsystem technology and microrobotics SN - 3540606580 AV - TJ163 .F38 1997 U1 - TJ 163 .F38 1997 21 PY - 1997/// CY - Berlin, New York PB - Springer KW - Design and construction KW - Microfabrication KW - Electromechanical devices KW - Microrobots KW - Robotics N1 - Includes bibliographical references (p. [366]-401) and index UR - http://www.loc.gov/catdir/enhancements/fy0815/96053992-d.html ER -