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Microsystem design /

by Senturia, Stephen D.
Material type: materialTypeLabelBookPublisher: Boston : Kluwer Academic Publishers, 2001Description: xxvi, 689 p. : ill. ; 24 cm.ISBN: 0792372468 (alk. paper).Subject(s): Microelectromechanical systems -- Design and construction | System design | MicroelectronicsOnline resources: Publisher description | Table of contents only
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Epoka University Library
TK 7875 .S46 2000 (Browse shelf) Available

Includes bibliographical references (p. [665]-676) and index.

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