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Integrated circuits : chemical and physical processing : developed from the winter symposium /

by Stroeve, Pieter; American Chemical SocietyDivision of Industrial and Engineering Chemistry..
Material type: materialTypeLabelBookSeries: ACS symposium series, 290. Publisher: Washington, D.C. : American Chemical Society, 1985Description: ix, 348 p. : ill. ; 24 cm.ISBN: 0841209405.Subject(s): Integrated circuits -- Very large scale integration -- Design and construction -- CongressesOnline resources: Publisher description | Table of contents only
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Epoka University Library
TK 7874 .I5462 1985 (Browse shelf) Available

Includes bibliographies and indexes.

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